<P> The process of metalorganic vapour phase epitaxy (MOCVD) entails pyrolysis of volatile organometallic compounds to give semiconductors, hard coatings, and other applicable materials . The reactions entail thermal degradation of precursors, with deposition of the inorganic component and release of the hydrocarbons as gaseous waste . Since it is an atom - by - atom deposition, these atoms organize themselves into crystals to form the bulk semiconductor . Silicon chips are produced by the pyrolysis of silane: </P> <Dl> <Dd> SiH → Si + 2 H </Dd> </Dl> <Dd> SiH → Si + 2 H </Dd> <P> Gallium arsenide, another semiconductor, forms upon co-pyrolysis of trimethylgallium and arsine . </P>

The thermal decomposition of solid fuels to produce vapors is known as